Knudsen forces on microcantilevers
نویسندگان
چکیده
When two surfaces at two different temperatures are separated by a distance comparable to a mean-free path of the molecules of the ambient medium, the surfaces experience Knudsen force. This mechanical force can be important in microelectromechanical systems and in atomic force microscopy. A theoretical discussion of the magnitude of the forces and the conditions where they can be encountered is discussed. A potential application of the Knudsen force in designing a cantilever-based vacuum gauge is discussed. © 2002 American Institute of Physics. @DOI: 10.1063/1.1515108#
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